DN63CF FUSED SILICA VIEWPORT EXCIMER GRADE, 0.18 to 2μ, NO COATING
110-VPQZ-C63-EX
DN63CF FUSED SILICA VIEWPORT EXCIMER GRADE, 0.18 to 2μ, NO COATING
Viewports
Inclusions max 0.03mm2 /100cm3 (class 0)
Price:
Specifications
| Vacuum Leak Rate | UHV <5x10-10 mbar l/s |
| Size or DN | DN63CF (4 ½ " OD flange) |
| Compliance | ISO 3669:2017 |
| Vacuum Seal | Annealed Cu Gasket |
| Body Material | Stainless Steel 304 |
| Temperature Range | -100°C to 200°C |
| Transmission | >99.5%@ 193nm |
| Inside Diameter | 68mm |
| Dimension A | 6.4 |
| Flatness | λ/4 @632nm |
| Parallelism | <10 arc sec |
| Surface Finish | 20-10 Scratch-dig |
| Optical Material | Excimer EUV grade Fused Silica, grade A 3D |
| Optical Range | 180-2000nm |