DN63CF EXCIMER GRADE FUSED SILICA VIEWPORT FOR 193nm ArF EXCIMER LASER
110-ARF-C63
DN63CF EXCIMER GRADE FUSED SILICA VIEWPORT FOR 193nm ArF EXCIMER LASER
Viewports
Laser damage threshold 1J/cm2 for 10ns pulse
Price:
Specifications
| Vacuum Leak Rate | UHV <5x10-10 mbar l/s |
| Size or DN | DN63CF (4 ½ " OD flange) |
| Compliance | ISO 3669:2017 |
| Vacuum Seal | Annealed Cu Gasket |
| Body Material | Stainless Steel 304 |
| Temperature Range | -100°C to 200°C max |
| Transmission | 193nm |
| Inside Diameter | 68mm |
| Flatness | λ/4 @632nm |
| Coating | V-coat with <0.25% reflection/surface |
| Parallelism | <10 arc sec |
| Surface Finish | 20/10 Scratch/Dig |
| Optical Material | Excimer grade fused silica |